Ward Technologies, Inc.

Meeting the demands for purity in processing for 30 years.”

Text Box: Product Detail

To contact us:

Phone: 480-831-5500

E-mail: info@wardtechnologiesinc.com

The Ward Technologies logoThe Etchtek logoTwo Ecthtek baths. One is a recirculating, the other is not.


Constant Temperature Baths

The EQ/PQ Series Constant Temperature Controlled Baths are designed to be contaminant-free, rapid heating units suitable for wafer processing in wet etch, high temperature acid and solvent applications (except hydrofluoric acid). All EQ/PQ Series baths are manufactured using high purity fused quartz (minimum 99.9999% silica) which provides superior high temperature corrosion resistance greatly reducing the incidence of wafer contamination. As a result, the EQ/PQ Series baths represent the standard of excellence and reliability for integrated circuit manufacturing processing.

The EQ/PQ Series standard baths are of molded construction which provides maximum strength and eliminates sharp corners thus facilitating ease of cleaning; each vessel includes a bottom well to accommodate a stirrer or a drain.

In addition, Etchtek® has designed the EQ/PQ Series so that no temperature sensors or elements contact the process. ETCHTEK® pioneered the use of the dual thermodics independent of the controller thermocouples to guarantee power shutdown.

The Etchtek® EQ/PQ Series Baths are available in a variety of standard sizes to 300mm. Custom sizes are also available.

A stainless steel bath

Contact us at: 480-831-5500

Ward Technologies, Inc. 2011. All rights reserved.

P.O. Box 1121

Laveen AZ 85339
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